We now offer leak-tight pumps in the 500L class that provide greater leak tightness than the former models to meet the needs of those customers wishing to recover rare gases or environmentally hazardous gases efficiently or conduct highly accurate analyse
Five models are available, from ISP-50 to ISP-1000E.
The pumps can deal with a wide range of applications from atmospheric pressure to the ultimate pressure.
These are multi-voltage pumps that can be used with any type of power supply around the world (except ISP-50).
The dry scroll vacuum pumps are used in various vacuum environments, ranging from the accelerator market to the general-purpose vacuum device market.
These pumps provide clean vacuum without back-diffusion of lubricating oil.
They endure repeated continuous operation between atmospheric pressure and vacuum and are capable of continuous operation near atmospheric pressure.
These features make the pumps best-selling models.
The processes of suction, compression and exhaust proceed continuously with little change in torque, resulting in low vibration and low noise.
The suction chamber and exhaust chamber are not adjacent to each other, making the pumps less prone to leaks and highly efficient.
Since the pumps do not use cooling water or lubricating oil, they are easy to install and maintain.
There is no need to inspect and replace oil filters, lubricating oil, etc.
|■Sputtering equipment, vacuum deposition equipment, ion plating equipment||■Accelerator|
|■Surface modification, electron beam process||■Vacuum furnace, vacuum heat treatment furnace|
|■Gas circulation and recovery devices||■Laboratory experiments and analyzers|
|■Vacuum Pump system||■Vacuum packaging machine|
|■He leak detector||■Others|
|■Vacuum vacuum chuck|